Key Features for LEXT

High-resolution 3D observation
    and measurement in real time
"One click 3D" capture button
Highly reliable fine surface
    profile measurement
Fast and easy operation
Repeatability
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Key FeaturesSpecificationsDimensions

3D image capturing with one click automatically detecting upper and lower limits One click 3D
With LEXT, 3D image capturing is performed by just one click of the “3D capture button”. Upper- and lower-limit settings or other cumbersome preparations are unnecessary. A beginner can obtain a 3D image of the best quality easily. For experienced users this automated 3D image capturing feature reduces their work load and contributes greatly to increasing their work efficiency.
From top to bottom: Laser printer toner; wafer reverse face; wafer circuits patterns; Polymeric film Display I - Observation Methods
The LEXT OLS3100 offers versatile observation methods to handle a wide range of applications.
  • Brightfield observation: Colour information can be obtained from brightfield observation.Therefore brightfield observation can be used effectively to observe a flaw on a colour filter or to locate the positionof an area of corrosion on metal.
  • DIC (Differential Interference Contrast) observation: In DIC observation it is possible to observe a scratch or flaw as small as a few nanometers in height that could not be observed in a brightfield observation.
  • Laser confocal: Observation with much higher level of resolution impractible with conventional microscopes is now possible through a combination of a 408 nm laser and confocal optics.
  • Laser confocal DIC: Microscopic unevenness on a surface can be observed in three dimensions in real time, which is impossible with conventional laser microscopes. Observation of surface conditions with the level of dimensional reality comparable to that of an SEM has been made fully possible, opening up a new dimension in surface profile observation.
Display II - Software Features
  • Adjustable 3D image: The angle of a 3D image can be changed freely now with the mouse by grabbing the image. In addition the 3D image can be scaled up or down in 100 steps using the mouse wheel. This is done using a unique algorithm to prevent the quality of the enlarged image from deteriorating. The background colour can now also be changed to improve the observation and contrast of the specimen.

  • 3D image presentation patterns: A variety of 3D image presentation patterns are provided, including surface texture, real colour, wired frame, etc. A 3D image can be rendered to make it more visually effective.

World-class resolution and precision
The optical system designed exclusively for use with 408 nm laser light (violet opt system) prevents the occurrence of aberrations associated with the use of a short-wavelength light source, and brings the highest performance out of the 408 nm light source. Such a high level of resolution has been made possible by the confocal optical system having an optimised circular pinhole and the highspeed XY scanner with the MEMS technology of Olympus. With the world's highest-level planar resolution, a line or space of 0.12 μm can be resolved. Additionally, the 0.01 μm height resolution supports the user in undertaking measurements of microscopic surface profiles.
Exclusive lens design
An apochromatic objective lens exclusively for Confocal Laser Scanning Microscopes, which improves the optical performance with a 408 nm laser light, was developed. This special objective lens developed with the world-class optical technology of Olympus enables the highest level of observational clarity and measurement accuracy at high magnifications.
Measurements that can be trusted
Highly reliable data can be provided based on a strict traceability system that is linked with the JCSS (Japan Calibration Service System). A distance can be measured in real time during live observation by using the image intensity profile. 3D measurements like step height, line width and the distance between two points can now be measured on the 3D image, allowing measurement conditions to be recognised intuitively.

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